19 March 1999 Si/Si1-xGex waveguide components for WDM demultiplexing
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We report on the development of building blocks of Si/Si1- xGex/Si planar waveguide WDM circuits -- an optical splitter/combiner and the first demonstration of an Si/Si1- xGex/Si arrayed waveguide grating (AWG) demultiplexer. The prototype AWG is a four channel device with a 400 GHz ((Delta) (lambda) equals 2.3 nm) channel spacing, and operates in the 1300 nm wavelength range. Strain and refractive index in the Si1-xGex epilayers play a critical role in device performance. The AWG waveguide heterostructure has total Si1-xGex layer thickness well beyond the measured critical thickness for lattice relaxation, but is stabilized against dislocation formation by the insertion of Si capping layers during growth. Single mode curved ridge waveguides formed from this material show no obvious bend losses for radii of curvature as small as 4 mm.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Siegfried Janz, Dan-Xia Xu, Jean-Marc Baribeau, Andre Delage, Robin L. Williams, "Si/Si1-xGex waveguide components for WDM demultiplexing", Proc. SPIE 3630, Silicon-based Optoelectronics, (19 March 1999); doi: 10.1117/12.342798; https://doi.org/10.1117/12.342798

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