13 April 1999 High-speed traveling-wave electrodes for polymeric electro-optic modulators
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Proceedings Volume 3632, Optoelectronic Interconnects VI; (1999); doi: 10.1117/12.344624
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States
Abstract
A detailed design and fabrication procedure of high-speed traveling-wave electrodes for EO polymer-based modulator has been developed. Design consideration, thick photoresist deposition and electroplating are specially focused on. A lot of practical experiences are introduced as well. This kind of modulator can be used in satellite receiver systems, remote connection of cellular radio systems, and LANs.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhong Han, Suning Tang, Dechang An, Lin Sun, Xuejun Lu, Zan Shi, Qingjun Zhou, Ray T. Chen, "High-speed traveling-wave electrodes for polymeric electro-optic modulators", Proc. SPIE 3632, Optoelectronic Interconnects VI, (13 April 1999); doi: 10.1117/12.344624; https://doi.org/10.1117/12.344624
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KEYWORDS
Electrodes

Gold

Photoresist materials

Plating

Electroplating

Polymers

Microwave radiation

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