1 June 1999 Fabrication and deflection measurement of micromirrors supported by an S-shape girder
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Abstract
Micromirrors supported by S-shape girders were fabricated and their angular deflections were measured using a laser- based system. A micromirror consists of a 50 micrometers X 50 micrometers aluminum plate, posts and an S-shape girder. Two electrodes were deposited on two corners of the substrate beneath the mirror plate. 50 X 50 micromirror array were fabricated using the Al-MEMS process. The electrostatic force caused by the voltage difference between the mirror plate and one of the electrodes causes the plate to tilt under the girder touches substrate. Bias voltage of the mirror plate is between 25 approximately 35 V and signal pulse voltage on the electrodes is 5 V. A laser-based system capable of real-time two-dimensional measurements of the angular deflection of the micromirror was developed. The operation of the system is based on measuring the displacement of a HeNe laser beam reflecting off the micromirror. The resonance frequency of the micromirror is 50 kHz when the girder touches the substrate and it is 25 kHz when the micromirror goes back to flat position, since the moving mass is about twice of the former case. The measurement results also revealed that the micromirror slants to the other direction even after the girder touches the substrate.
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Hoseong Kim, Hoseong Kim, Jonggook Kim, Jonggook Kim, Yong-Kweon Kim, Yong-Kweon Kim, Hyungjae Shin, Hyungjae Shin, } "Fabrication and deflection measurement of micromirrors supported by an S-shape girder", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); doi: 10.1117/12.349317; https://doi.org/10.1117/12.349317
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