1 June 1999 Liquid crystal on silicon beam deflector
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A high efficiency, low cost, low voltage operation liquid crystal on silicon beam steering device with multiple angles addressing capability is developed. Currently, seven steering angles with as high as 92.7% efficiency are achieved within 2.85 v. The device's design consideration, fabrication process as well as the characterization results are described.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xu Wang, Demetri Psaltis, "Liquid crystal on silicon beam deflector", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); doi: 10.1117/12.349322; https://doi.org/10.1117/12.349322

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