1 June 1999 Liquid crystal on silicon beam deflector
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Abstract
A high efficiency, low cost, low voltage operation liquid crystal on silicon beam steering device with multiple angles addressing capability is developed. Currently, seven steering angles with as high as 92.7% efficiency are achieved within 2.85 v. The device's design consideration, fabrication process as well as the characterization results are described.
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Xu Wang, Xu Wang, Demetri Psaltis, Demetri Psaltis, } "Liquid crystal on silicon beam deflector", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); doi: 10.1117/12.349322; https://doi.org/10.1117/12.349322
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