20 May 1999 Optimal method for fabrication of gradient dichroic mirrors without mask
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Abstract
Gradient dichroic mirrors consisting 25 alternating layers of TiO2 and SiO2 were prepared by reactive electron beam deposition at a glass-substrate temperature of 300 degrees C in a home made planetary planar coating system without mask. Samples with the various tilt angles from the rotating axis were hanged on the edge of four specially designed hollow planets. The thickness variation for a single layer SiO2 over a planet of 16 cm diameter at the height of 60 cm was less than 3 percent. This coating system was very suitable for the coating of gradient dichroic mirrors with large area showing the consistent color performance with various incident angles across the mirror surface.
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Rung-Ywan Tsai, Sen Chrong Shiau, Tzu-Shin Chen, "Optimal method for fabrication of gradient dichroic mirrors without mask", Proc. SPIE 3634, Projection Displays V, (20 May 1999); doi: 10.1117/12.349363; https://doi.org/10.1117/12.349363
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