28 April 1999 Monitoring the rate of pulsed laser deposition of silver thin films using a fiber optic sensor
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Proceedings Volume 3666, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98; (1999) https://doi.org/10.1117/12.347978
Event: International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98, 1998, New Delhi, India
Abstract
A new sensing technique for the in situ monitoring of the rate of pulsed laser deposition of metal thin films has been developed. This optical fiber based sensor utilizes the evanescent wave penetration of waveguide modes into the uncladded portion of a multimode fiber. The utility of this optical fiber sensor is demonstrated in the case of pulsed laser deposition (PLD) of silver thin films obtained by a Q- switched Nd:YAG laser which is used to irradiate a silver target at the required conditions for the preparation of thin films. In the present paper we describe the performance and characteristics of this sensor and show how this device can be an effective tool for the monitoring of the deposition rate of silver thin films.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Shelly Mechery, Periasamy Radhakrishnan, V. P. N. Nampoori, C. P. G. Vallabhan, "Monitoring the rate of pulsed laser deposition of silver thin films using a fiber optic sensor", Proc. SPIE 3666, International Conference on Fiber Optics and Photonics: Selected Papers from Photonics India '98, (28 April 1999); doi: 10.1117/12.347978; https://doi.org/10.1117/12.347978
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