4 June 1999 Active vibration control using piezoelectric smart disks
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Abstract
In high-precision motion systems, like wafer stages and electron microscopes, mechanical vibrations are a major point of concern. Often, these vibrations have small amplitudes (micrometers) and relatively high frequency (greater than 50 Hz). The so-called Smart Disc (a combined piezoelectric actuator and sensor) is a device that might be used to suppress these vibrations actively. The feasibility of the Smart Disc concept is investigated, using an experimental set- up, consisting of a double mass-spring system, with two Smart Discs. This system has two badly damped resonance modes, to be damped by the Smart Disc(s), by means of feedback of the measured local interaction forces to the actuated displacements. The corresponding control problem, is to minimize the vibrations of the two masses, as a result of a disturbing force. With the experimental set-up, some aspects have been investigated. In the modeling phase, the system revealed high-frequent (3 kHz) resonance peaks, which appeared to originate from the Smart Disc housings. These dynamics have been identified and taken into account in the control design. Because of these high-frequent dynamics near the Nyquist frequency, and the high gain at that frequency (which is inherent to the Smart Disc concept) discrete time effects have been taken into account explicitly. Besides conventional active vibration control strategies, more sophisticated (MIMO H(infinity ), discrete time) control design strategies have been applied successfully.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gert van Schothorst, "Active vibration control using piezoelectric smart disks", Proc. SPIE 3667, Smart Structures and Materials 1999: Mathematics and Control in Smart Structures, (4 June 1999); doi: 10.1117/12.350114; https://doi.org/10.1117/12.350114
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