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9 June 1999 Development of novel magnetic field monolithic sensors with standard CMOS-compatible MEMS technology
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Abstract
In this paper novel Micro-Electro-Mechanical-Systems for magnetic field sensing are presented. These devices have been realized by using a micromachining approach which is fully compatible with standard CMOS technology. Several different structures have been developed and tested. Analytical system models have been defined in order to allow effective numerical simulation of the electro-mechanical system behavior. Both static and resonant working modes have been studied for different sensor architectures. Experimental results are reported regarding the metrological characterization of the devices. Particular attention has been also devoted to the effects of interfering inputs on the sensor output.
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Salvatore Baglio, Laurent Latorre, and Pascal Nouet "Development of novel magnetic field monolithic sensors with standard CMOS-compatible MEMS technology", Proc. SPIE 3668, Smart Structures and Materials 1999: Smart Structures and Integrated Systems, (9 June 1999); https://doi.org/10.1117/12.350721
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