18 May 1999 Monitoring micro floor vibrations with distributed fiber optic sensors
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Abstract
In certain applications, such as microelectronic manufacturing, monitoring and controlling small floor vibrations can be essential. This paper describes how an array of distributed fiber optic sensor can be used to monitor micro floor vibrations as part of an adaptive control strategy. The performance target is to limit vibrations in 'the 10 Hz frequency range to less than 10 microinches peak to peak. The distributed fiber optic sensor are of an interferometric design that uses a single mode to multi mode to single mode configuration. The fibers are laid in an orthogonal grid so as to localize vibration hot spots. Data comparing the performance of the vibration sensing array with that of conventional point piezoelectric accelerometers, as well as sensing and control strategies will be presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dryver R. Huston, William B. Spillman, Wolfgang Sauter, Noel V. Pelczarski, "Monitoring micro floor vibrations with distributed fiber optic sensors", Proc. SPIE 3671, Smart Structures and Materials 1999: Smart Systems for Bridges, Structures, and Highways, (18 May 1999); doi: 10.1117/12.348661; https://doi.org/10.1117/12.348661
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