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20 July 1999 MEMS-IDT-based accelerometers and gyroscopes
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Abstract
The integration of MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna to realize a programmable accelerometers and gyroscopes suitable for inertial navigation is presented in this paper. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by a RF system with the advantage of no power requirements at the sensor site. The sensors presented are simple in construction and easy to manufacture with existing silicon micromachining and stereo lithography techniques. Programmable sensors can be achieved with splitfinger interdigital transducers (IDTs) as reflecting structures. If IDTs are short-circuited or capacitively loaded, the wave propagates without any reflection whereas in an open circuit configuration, the IDTs reflect the incoming SAW signal. The programmable accelerometers and gyroscopes can thus be achieved by using an external circuitry on a semiconductor chip using hybrid technology.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vijay K. Varadan, Pascal Xavier, Vasundara V. Varadan, D. Suh, Massood Zandi Atashbar, and K. A. Jose "MEMS-IDT-based accelerometers and gyroscopes", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354267
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