Micromechanical filters for miniaturized low-power communications

Clark T.-C. Nguyen

doi:10.1117/12.354265

20 July 1999 Micromechanical filters for miniaturized low-power communications

Clark T.-C. Nguyen

Proceedings Volume 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS; (1999) https://doi.org/10.1117/12.354265
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as IC-compatible tanks for use in the highly selective filters of communications subsystems. To date, bandpass filters consisting of spring- coupled micro-mechanical resonators have been demonstrated in a frequency range from HF to VHF. In particular, two- resonator micromechanical bandpass filters have been demonstrated with frequencies up to 35 MHz, percent bandwidths on the order of 0.2%, and insertion losses less than 2 dB. In addition, free-free beam, single-pole resonators have recently been realized with frequencies up to 92 MHz and Q's around 8,000. Evidence suggests that the ultimate frequency range of this high-Q tank technology depends upon material limitations, as well as design constraints--in particular, to the degree of electromechanical coupling achievable in micro-scale resonators.

Citation Download Citation

Clark T.-C. Nguyen "Micromechanical filters for miniaturized low-power communications", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); https://doi.org/10.1117/12.354265

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