20 July 1999 Micromechanical filters for miniaturized low-power communications
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Abstract
With Q's in the tens to hundreds of thousands, micromachined vibrating resonators are proposed as IC-compatible tanks for use in the highly selective filters of communications subsystems. To date, bandpass filters consisting of spring- coupled micro-mechanical resonators have been demonstrated in a frequency range from HF to VHF. In particular, two- resonator micromechanical bandpass filters have been demonstrated with frequencies up to 35 MHz, percent bandwidths on the order of 0.2%, and insertion losses less than 2 dB. In addition, free-free beam, single-pole resonators have recently been realized with frequencies up to 92 MHz and Q's around 8,000. Evidence suggests that the ultimate frequency range of this high-Q tank technology depends upon material limitations, as well as design constraints--in particular, to the degree of electromechanical coupling achievable in micro-scale resonators.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Clark T.-C. Nguyen, Clark T.-C. Nguyen, } "Micromechanical filters for miniaturized low-power communications", Proc. SPIE 3673, Smart Structures and Materials 1999: Smart Electronics and MEMS, (20 July 1999); doi: 10.1117/12.354265; https://doi.org/10.1117/12.354265
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