14 June 1999 Determining measurement variation of lens parameters using Monte Carlo simulations
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In this paper the strength of Monte Carlo simulations to estimate measurement variation in the outcomes of lens parameters is shown. A standard R and R study approach is compared to one in which Monte Carlo simulations are used. The biggest advantage in the latter case is that one can correct for the destructive kind of the measurement. Further, not only the accuracy improves, but also the time needed to perform the study reduces drastically and qualitative studies can be carried out easily.
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Wilco C.A. Ligthart, "Determining measurement variation of lens parameters using Monte Carlo simulations", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); doi: 10.1117/12.350852; https://doi.org/10.1117/12.350852

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