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14 June 1999 Sensitivity analysis of fitting for scatterometry
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Abstract
The sensitivity analysis of fitting (SAF) is a formalism that determines the type of measurements that yields optimum determination precision. SAF is applied to ellipsometric- scatterometry of surface relief gratings and for the optimum measurement configuration predicts a significant improvement compared to the conventional scatterometry measurement configurations. The SF predictions for precision are compared to actual values obtained experimentally, and a qualitative agreement is obtained. The discrepancies between theory and experiment are likely due to inaccurate modeling of the grating.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petre-Catalin Logofatu and John Robert McNeil "Sensitivity analysis of fitting for scatterometry", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350805
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