11 June 1999 Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography
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Abstract
'On-chip' color filters are commonly used to convert monochromatic, solid-state image sensor into color sensors because they offer a good compromise between cost and resolution for digital cameras. The color filters are fabricated directly onto the surface of the CMOS or CCD image sensors, which generates a mosaic array of pixel-size filter elements. Diazonaphthoquinone-novolak photoresist is used to produce these filters by successively depositing and patterning each color layer. The choice of colors can vary from additive to subtractive or combinations of both.
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Harris R. Miller, "Color filter array for CCD and CMOS image sensors using a chemically amplified thermally cured pre-dyed positive-tone photoresist for 365-nm lithography", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); doi: 10.1117/12.350159; https://doi.org/10.1117/12.350159
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