New photoresist stripper and a system for recycling it

Hideki Nishida; Hiroshi Kikuchi; Kensuke Yano; Hiroyasu Matsuda

doi:10.1117/12.350252

11 June 1999 New photoresist stripper and a system for recycling it

Hideki Nishida, Hiroshi Kikuchi, Kensuke Yano, Hiroyasu Matsuda

Proceedings Volume 3678, Advances in Resist Technology and Processing XVI; (1999) https://doi.org/10.1117/12.350252
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Although it is hard to strip away the photoresist layer damaged during the etching process in manufacturing liquid crystal display devices, monoethynoloamine (MEA) was found to have excellent photoresist stripping characteristics. Crosslinked novolak resin is easily dissolved in a MEA solution because MEA has a large cohesive energy, a strong affinity for novolak, and a small molecular weight. Pure MEA can be recycled with high yield by using a simple system that has short multiple-pipe distillation columns that have high heat-transfer efficiency. The pipes in our distillation system are made of 304 stainless steel because this material was found to resist corrosion in an aqueous MEA solution better than 316L stainless or Cu. This recycling system has been operating in production lines for more than two years without showing any signs of trouble.

Citation Download Citation

Hideki Nishida, Hiroshi Kikuchi, Kensuke Yano, and Hiroyasu Matsuda "New photoresist stripper and a system for recycling it", Proc. SPIE 3678, Advances in Resist Technology and Processing XVI, (11 June 1999); https://doi.org/10.1117/12.350252

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available