26 July 1999 Application of the hybrid finite-difference time-domain method to modeling curved surfaces in three-dimensional lithography simulation
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Proceedings Volume 3679, Optical Microlithography XII; (1999); doi: 10.1117/12.354316
Event: Microlithography '99, 1999, Santa Clara, CA, United States
Abstract
The original hybrid-FDTD method developed by Wu and Itoh is extended to handle lossy material with positive or negative dielectric constants. Numerical results are given to compare the hybrid-FDTD method and standard FDTD. The result show that the hybrid-FDTD method is much more accurate than standard FDTD when the same mesh spacing is used in both methods. In the case of lossy materials with negative dielectric constants, the hybrid-FDTD method is found to be found to be much more accurate than standard FDTD even when a mesh spacing four times finer is used in the latter method. These results highlight the importance of modeling curved surfaces accurately in DUV lithography simulation using the hybrid-FDTD method.
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Michael S. Yeung, Eytan Barouch, "Application of the hybrid finite-difference time-domain method to modeling curved surfaces in three-dimensional lithography simulation", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); doi: 10.1117/12.354316; https://doi.org/10.1117/12.354316
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KEYWORDS
Dielectrics

Finite-difference time-domain method

Image quality standards

Lithography

3D modeling

Optical spheres

Deep ultraviolet

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