PROCEEDINGS VOLUME 3680
DESIGN, TEST, AND MICROFABRICATION OF MEMS/MOEMS | 30 MARCH - 1 APRIL 1999
Design, Test, and Microfabrication of MEMS and MOEMS
Editor(s): Bernard Courtois, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita, Jean Michel Karam, Karen W. Markus, Wolfgang Ehrfeld
Editor Affiliations +
DESIGN, TEST, AND MICROFABRICATION OF MEMS/MOEMS
30 March - 1 April 1999
Paris, France
Test and Optimization
Nilmoni Deb, Sitaraman V. Iyer, Tamal Mukherjee, Ronald D. Shawn Blanton
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341153
Benoit Charlot, Salvador Mir, Erika F. Cota, Marcelo Lubaszewski, Bernard Courtois
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341215
Hans G. Kerkhoff
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341224
Gregory A. Kirkos, Robert P. Jurgilewicz, Stephen J. Duncan
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341234
Jean Philippe Blanc, Marc Belleville, Fabien Mieyeville, Hubert Bono
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341244
Emerging CAD Methods
Robert E. Rudd III, Jeremy Q. Broughton
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341254
Vladimir L. Rabinovich, Joost C.C. Van Kuijk, Susan Zhang, Stephen F. Bart, John R. Gilbert
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341265
Edward K. Chan, Robert W. Dutton
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341276
Niels F. Pedersen
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341154
CAD Systems I
Barry Dyne, David A. Bernstein
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341174
M. G. Giridharan, Soumya Krishnamoorthy, Anantha Krishnan
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341184
Karim Liateni, David Moulinier, Bachar Affour, H. Boutamine, Jean Michel Karam, D. Veychard, Bernard Courtois, Ariel D. Cao
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341194
Bart F. Romanowicz, Stephen F. Bart, John R. Gilbert
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341200
Yie He, James Marchetti, Carlos Gallegus
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341201
Design
Stefan Finkbeiner, Jochen Franz, Stefan Hein, Andreas Junger, Joerg Muchow, Berhard Opitz, Wolfgang Romes, Oliver Schatz, Hans Peter Trah
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341202
Moussa Hoummady, L. Majewski, V. Robert, C. Bonjour, B. Chahboune
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341203
Jean-Philippe Gouy, A. Tixier, Gen Hashiguchi, Hiroshi Toshiyoshi, Hiroyuki Fujita
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341204
Sven Rehfuss, Claudia Marschner, Karl-Ludwig Krieger, Marcus Weser, Rainer Laur
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341205
Yoav P. Peles, Leonid P. Yarin, Gad Hetsroni
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341206
CAD Systems II
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341207
Jie Liu, Bicheng Wu, Xiaojun Liu, Edward A. Lee
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341208
Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, Ying Xu
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341209
Andrzej J. Przekwas, H. Q. Yang, Mahesh M. Athavale
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341210
Vladimir Szekely, A. Pahi, Marta Rencz
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341211
Infrastructure
Christian Schneider, Andreas Priebe, Rainer Brueck, Kai Hahn
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341212
Renato P. Ribas, D. Veychard, Jean Michel Karam, Bernard Courtois
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341213
Zeljko Mrcarica, Vladimir Risojevic, Michel Lenczner, Mirko Jakovljevic, Vanco Litovski
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341214
Rainer Brueck, Christian Schumer
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341216
Poster Papers
Phillip J. Stout, H. Q. Yang, Paul Dionne, Andy Leonard, Zhiqiang Tan, Andrzej J. Przekwas, Anantha Krishnan
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341217
Hans Kurt Toenshoff, Ferdinand von Alvensleben, Christian Kulik
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341218
Annick Alexandre, Guo Neng Lu, Mohamed Sedjil
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341219
Guo Neng Lu, Gerard Sou, Mohamed Ben Chouikha, Mohamed Sedjil
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341220
Mihail M. Dumitrescu, Corbel Cobianu, Dan C. Dascalu, Adrian Pascu
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341221
Arturas Ulcinas, Valentinas J. Snitka, Mindaugas Rackaitis
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341222
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341223
Mohamed Sedjil, Guo Neng Lu, Mohamed Ben Chouikha, Annick Alexandre
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341225
Benoit Charlot, Spiridon Moussouris, Salvador Mir, Bernard Courtois
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341226
Rainer Riesenberg, Thomas Seifert
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341227
F. Oms-Elisabelar, Christian Bergaud, L. Nicu
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341228
Jochen S. Thomas, Ralf Kuehnhold, Heiner Ryssel
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341229
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341230
Andreea R. Merticaru, Gabriel Moagar-Poladian
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341231
Mechanical and Electrochemical Micromachining and Micromolding
Manfred Weck, Stephan Fischer
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341232
Volker Piotter, Tobias Benzler, Thomas Hanemann, Heinz Woellmer, Robert Ruprecht, Juergen H. Hausselt
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341233
Oliver Kemmann, Carsten Schaumburg, Lutz Weber
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341235
Toru Shimizu, Yoichi Murakoshi, Zhanjie Wang, Ryutaro Maeda, Toshio Sano
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341236
David M. Allen, Sue A. Impey, Remi Robin, Tom T. Chen
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341237
Jean-Sebastian Danel, Michel Borel, Marie-Therese Delaye, Bernard Diem, Hubert Grange, France Michel, Patrice Rey, Sylvie Viollet-Bosson
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341238
LIGA
Stewart K. Griffiths, Jill M. Hruby, Aili Ting
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341239
Roland K. Kupka, Faycal Bouamrane, Marc Roulliay, Stephan Megtert
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341240
Shi Chang Tseng, C. T. Shi, Chia-Lung Kuo, Yu-chiao Cheng
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341241
Christian Thuerigen, Ulrich Beckord, Reiner Bessey
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341242
3D Microfabrication
Hans Kurt Toenshoff, Ferdinand von Alvensleben, Andreas Ostendorf, Guido Willmann, Thilo Wagner
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341243
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341245
Serge Monneret, Virginie Loubere, Serge Corbel
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341246
Peter Siebert, G. Petzold, Joerg Mueller
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341247
Mark S. Talary, Julian P.H. Burt, Nadeem Hasan Rizvi, Phil T. Rumsby, Ron Pethig
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341248
Sensors, Electronic Devices, and Actuators
Peter L. Gammel, Bradley P. Barber, Victor M. Lubecke, Nathan Belk, M. R. Frei
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341249
Matthias Nienhaus, Wolfgang Ehrfeld, H. D. Stoelting, Frank Michel, S. Kleen, S. Hardt, Felix Schmitz, T. Stange
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341250
Zoran G. Djuric, Tatjana Dankovic, Zoran S. Jaksic, Danijela Randjelovic, Radomir Petrovic, Wolfgang Ehrfeld, Andreas Schmidt, Karl Heinz Hecker
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341251
Zoran S. Jaksic, Radomir Petrovic, Danijela Randjelovic, Tatjana Dankovic, Zoran G. Djuric, Wolfgang Ehrfeld, Andreas Schmidt, Karl Heinz Hecker
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341252
MOEM Devices
Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, Pierre Viktorovitch
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341253
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341255
Jens Hossfeld, Thomas Paatzsch, Jens Schulze, Michel Neumeier, Lutz Weber, Hans-Dieter Bauer, Wolfgang Ehrfeld
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341256
Laurent R. Fulbert, Engin Molva, Jeannine Marty, Philippe Thony, Marc Rabarot, Bernard Ferrand
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341257
Patrick Louis Mottier, Eric Ollier, Patrick Pouteau, Karine Petroz, Sylvie Jarjayes
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341258
Assembly and Production Techniques
Adisorn Tuantranont, Victor M. Bright, Wenge Zhang, Y. C. Lee
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341259
Hiroshi Toshiyoshi, Yoshio Mita, Minoru Ogawa, Hiroyuki Fujita
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341260
Ramona Eberhardt, A. Gebhardt, Torsten Scheller
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341261
Gordana Popovic, Werner Brenner, Helmut Detter
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341262
Poster Papers
Marcus Weser, Josef Binder, Sven Rehfuss, Rainer Laur
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341263
Olaf Renken, Wolfgang Benecke
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341264
Holger Becker, Wolfgang Ehrfeld, Rainer Pommersheim
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341266
Manfred Weck, Bernd Petersen
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341267
Henne van Heeren, Stefan Sanchez, Job Elders, Rene G. Heideman
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341268
Christiane Thielemann, Gisela Hess
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341269
Christian Bergaud, L. Nicu, A. Martinez, P. Gerard, M. Benzohra
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341270
Neila Kaou, Cedrick Chappaz, Skandar Basrour, Michel de Labachelerie
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341271
Michael H. Beggans, Dentcho I. Ivanov, Steven G. Fu, Thomas G. Digges III, Kenneth R. Farmer
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341272
Victor V. Luchinin, Andrey V. Korlyakov, Alexander A. Vasil'ev
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341273
Xiaozhong Song, Dominiek Reynaerts, Wim Meeusen, Hendrik Van Brussel
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341274
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341275
Laurence Beluze, Arnaud Bertsch, Philippe Renaud
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341277
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341278
Peter M. Martin, Dean W. Matson, Wendy D. Bennett, Donald C. Stewart, Yuehe Lin
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341279
Barbara Janyszek, Ryszard Jachowicz, Dorota Pijanowska, Jerzy Jazwinski
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341280
Patrick W. Leech, Geoffrey K. Reeves
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341281
Hsiharng Yang, Michael J. Vasile
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341282
Sung W. Moon, Sang Ho Lim, Sang Bae Lee, HoKwan Kang, Min Chul Kim, Seok Hee Han, Myung-Hwan Oh
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341283
Mingbao Zhou, Linbo Bai, Zhan Li, HanMin Yao
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341284
Arvi Kruusing, Seppo Leppaevuori, Antti Uusimaki, Matti Uusimaki
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341285
Jingqin Su, Jinglei Du, Jun Yao, Fuhua Gao, Yongkang Guo, Zheng Cui
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341286
Monique Dilhan, Josiane Tasselli, Daniel Esteve, Pierre Temple-Boyer, Henri Camon, Marc Anduze, Stephane Colin
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341155
Victor V. Luchinin, Andrey V. Korlyakov, Givi I. Jandjgava, Stanislav V. Prosorov, Aleksander K. Solomatin, Anatoley V. Sorokin, Sergey G. Kucherkov, Leonid A. Severov, Valeriy K. Ponomarev
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341156
Carole Rossi, Norbert Fabre, Veronique Conedera, Daniel Esteve
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341157
Stephan Megtert, Franz Josef Pantenburg, Sven Achenbach, Roland K. Kupka, Juergen Mohr, Marc Roulliay
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341158
Youn Tae Kim, Young-Yong Kim, Chi-Hoon Jun
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341159
Chi-Hoon Jun, Suk Koon Kim, Dong-Seong Kwag, Youn Tae Kim
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341160
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341161
Zhanjie Wang, Ryutaro Maeda, Kaoru M. Kikuchi
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341162
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341163
Sebastiano Brida, Lorenza Ferrario, Flavio Giacomozzi, Domenico Giusti, Vittorio Guarnieri, Benno Margesin, Giorgio U. Pignatel, Giovanni Soncini, Alexey N. Vasil'ev, et al.
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341164
Sebastiano Brida, Lorenza Ferrario, Vittorio Guarnieri, Flavio Giacomozzi, Benno Margesin, Makarand Paranjape, Giovanni Verzellesi, Mario Zen
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341165
Taeko Ando, Tetsuo Yoshioka, Mitsuhiro Shikida, Kazuo Sato
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341166
Vladimir A. Aksyuk, Flavio Pardo, David J. Bishop
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341167
Thomas Hantschel, Robert Stephenson, Thomas Trenkler, Peter De Wolf, Wilfried Vandervorst
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341168
Cinzia Caliendo, Enrico Verona
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341169
Zeno Rummler, Walter Bacher, Volker Saile, Werner K. Schomburg
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341170
Kaihsiang Yen, Chienliu Chang, Peizen Chang, Jinghung Chiou, Jenn-Yi Chen, Hunghsuan Lin
Proceedings Volume Design, Test, and Microfabrication of MEMS and MOEMS, (1999) https://doi.org/10.1117/12.341171