PROCEEDINGS VOLUME 3680
DESIGN, TEST, AND MICROFABRICATION OF MEMS/MOEMS | 30 MARCH - 1 APRIL 1999
Design, Test, and Microfabrication of MEMS and MOEMS
DESIGN, TEST, AND MICROFABRICATION OF MEMS/MOEMS
30 March - 1 April 1999
Paris, France
Test and Optimization
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Emerging CAD Methods
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CAD Systems I
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Design
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CAD Systems II
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Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, pg 278 (10 March 1999); doi: 10.1117/12.341211
Infrastructure
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, pg 290 (10 March 1999); doi: 10.1117/12.341212
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Poster Papers
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, pg 328 (10 March 1999); doi: 10.1117/12.341217
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Mechanical and Electrochemical Micromachining and Micromolding
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LIGA
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3D Microfabrication
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Sensors, Electronic Devices, and Actuators
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MOEM Devices
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Assembly and Production Techniques
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Poster Papers
Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, pg 708 (10 March 1999); doi: 10.1117/12.341263
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Test and Optimization
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