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10 March 1999 Development of silicon microheaters for chemoresistive gas sensors
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341164
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastiano Brida, Lorenza Ferrario, Flavio Giacomozzi, Domenico Giusti, Vittorio Guarnieri, Benno Margesin, Giorgio U. Pignatel, Giovanni Soncini, Alexey N. Vasil'ev, Giovanni Verzellesi, and Mario Zen "Development of silicon microheaters for chemoresistive gas sensors", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341164
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