10 March 1999 Electrochemical microreactor
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341189
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
In this paper we present a new microdevice used for the anodic oxidation of organic compounds. It has as component parts an electrochemical micropump, 2 microreservoirs and a reaction chamber. the electrochemical micropump is electrochemical-pneumatic actuated, using an electrochemical generated gas as fluid motor. The volume of reaction chamber is 1.5 cubic mm and is equipped with working electrode, counterelectrode and reference electrode. Anisotropic etched silicon was used as construction material, Pt thick films and Ag/AgCl were used as electrode materials. Using this device, the anodic oxidation of 4-hydroxy-1,3- phenylendiammoniumdichlorid was performed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marin Gheorghe, Marin Gheorghe, Dan C. Dascalu, Dan C. Dascalu, Mihaela Ghita, Mihaela Ghita, } "Electrochemical microreactor", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341189; https://doi.org/10.1117/12.341189
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