10 March 1999 Examples of MEMS technologies resulting in industrial transfers
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341238
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
We present here three technological processes developed by LETI which have resulted in successful industrial transfers for MEMS.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Sebastian Danel, Jean-Sebastian Danel, Michel Borel, Michel Borel, Marie-Therese Delaye, Marie-Therese Delaye, Bernard Diem, Bernard Diem, Hubert Grange, Hubert Grange, France Michel, France Michel, Patrice Rey, Patrice Rey, Sylvie Viollet-Bosson, Sylvie Viollet-Bosson, } "Examples of MEMS technologies resulting in industrial transfers", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341238; https://doi.org/10.1117/12.341238
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