10 March 1999 Fault modeling of electrostatic comb-drives for MEMS
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341226
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
The work described in this paper is aimed at fault modeling and fault simulation of electrostatic comb-drives. At present, we have taken into account the most typical defects which we have encountered through fabrication of resonator test structures. These defects include stiction of the suspended beams to the substrate surface and the break of comb-drive model, and the impact of a faulty comb-drive is assessed for different resonator-based designs.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benoit Charlot, Spiridon Moussouris, Salvador Mir, Bernard Courtois, "Fault modeling of electrostatic comb-drives for MEMS", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341226; https://doi.org/10.1117/12.341226
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