10 March 1999 From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341228
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
A transformer equivalent circuit is used to represent a piezo-actuator. The circuit is developed starting from electromechanical transduction principles and included in SPICE software. The actuator is a length-expanded cantilever. Analytical and simulated results are compared and found in god agreement both in static and dynamic studies.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Oms-Elisabelar, Christian Bergaud, L. Nicu, "From circuit to microsystems: using a transformer-equivalent circuit to study a piezoelectric actuator", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341228; https://doi.org/10.1117/12.341228
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