Integration of SnO2 sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation

Corbel Cobianu; Raluca Iorgulescu; Cristian Savaniu; Antonela Dima; Dan C. Dascalu; Pietro Siciliano; Simona Capone; Roberto Rella; Fabio Quaranta; Lorenzo Vasanelli

doi:10.1117/12.341188

10 March 1999 Integration of SnO₂ sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation

Corbel Cobianu, Raluca Iorgulescu, Cristian Savaniu, Antonela Dima, Dan C. Dascalu, Pietro Siciliano, Simona Capone, Roberto Rella, Fabio Quaranta, Lorenzo Vasanelli

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341188
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Sol-gel organic synthesis of SnO₂ thin films from tin ethoxide precursor is reported here as a promising and cheap alternative of the 'classical' chemical and physical preparation methods of the SnO₂ thin films, for gas sensing applications. A simple, integrated circuit compatible test structure, for rapid evaluation of the sensing properties of the SnO₂ sol-gel derived thin films is described. The main features of our microstructure consists of a a heating resistor integrated on chip, made of highly boron doped silicon and a metallization system from Au/W deposited on a planarized chemically vapor deposited SiO₂ layer. The SnO₂ films have shown the well-known increase-maximum-decrease dependence of chemoresistance as a function of temperature, with a maximum at about 380 degrees C, when they are measured in clean, dry air. The sensitivity of SnO₂ films to high concentration of H₂ in air was studied within a quartz furnace, externally heated in the temperature range from 200 to 450 degrees C. The relative sensitivity is equal to 100 percent at temperatures as low as 200 degrees C, while its maximum value is anticipated to be above 450 degrees C. The CO sensing properties of SnO₂ layers were evaluated as a function of input power applied on the integrated heating resistor. We have obtained relative sensitivities of 30 percent for 500 ppm CO concentration in dry air and an input power of 209 mW.

Citation Download Citation

Corbel Cobianu, Raluca Iorgulescu, Cristian Savaniu, Antonela Dima, Dan C. Dascalu, Pietro Siciliano, Simona Capone, Roberto Rella, Fabio Quaranta, and Lorenzo Vasanelli "Integration of SnO₂ sol-gel processes to gas sensor microfabrication: H2 and CO sensitivity evaluation", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341188

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