Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems

Peter M. Martin; Dean W. Matson; Wendy D. Bennett; Donald C. Stewart; Yuehe Lin

doi:10.1117/12.341279

10 March 1999 Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems

Peter M. Martin, Dean W. Matson, Wendy D. Bennett, Donald C. Stewart, Yuehe Lin

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341279
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Microchannel microfluidic components are being developed for heat transfer, chemical reactor, chemical analysis, and biological analytical applications. Specific applications include chemical sensing, DNA replication, blood analysis, capillary electrophoresis, fuel cell reactors, high temperature chemical reactors, heat pumps, combustors, and fuel processors. Two general types of component architectures have been developed and the fabrication processes defined. All involve a lamination scheme using plastic, ceramic, or metal laminates, as opposed to planar components. The first type is a stacked architecture that utilizes functionality built in each layer, with fluid flow interconnects between layers. Each layer of the laminate has specific microchannel geometry, and performs a specific function. Polymeric materials are used primarily. Fabrication processes used are laser micromachining, wet and dry etching, and coating deposition. the laminates can also be micromolded plastics. The second architecture employs laminates to form internal microchannels and interconnects. Materials include ceramic tapes and high temperature metals. Catalysts can be placed in the microchannels. Fabrication processes used are diffusion bonding, ceramic bonding and firing, photochemical etching, and electrochemical micromachining. Bonding, thus sealing, the laminates is an important issue. Process conditions have been develop to reduce distortion of the laminates and to hermetically seal the components.

Citation Download Citation

Peter M. Martin, Dean W. Matson, Wendy D. Bennett, Donald C. Stewart, and Yuehe Lin "Laser-micromachined and laminated microfluidic components for miniaturized thermal, chemical, and biological systems", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341279

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