10 March 1999 Moems at Leti
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341258
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
We give a quick overview of MOEMS technologies under development at LETI. We mainly focus on recent developments in relation with the 'Europractice Competence Center Number 3' dedicated to MOEMS whose LETI is the coordinator. MOEMS are optical devices offering simultaneously optical and mechanical functions, and achieved in a collective manner by means of microelectronics like process and machines. Different devices and demonstrators already exist at LETI such as micro-switches for optical fiber networks, vibration sensors, scanning devices for laser or are under development such as tunable Fabry-Perot interferometers. Examples and performances are presented.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Patrick Louis Mottier, Patrick Louis Mottier, Eric Ollier, Eric Ollier, Patrick Pouteau, Patrick Pouteau, Karine Petroz, Karine Petroz, Sylvie Jarjayes, Sylvie Jarjayes, } "Moems at Leti", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341258; https://doi.org/10.1117/12.341258
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