CONFERENCE PROCEEDINGS
Advanced Search >
Home > Proceedings > Volume 3680 > Article
Translator Disclaimer
10 March 1999 Micromachined photonic integrated circuits for sensor applications: experimental results
Dana Cristea; Raluca Muller; Ioan Pavelescu
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341187
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
The paper presents the integration ont he same chip of: Mach-Zehnder interferometers and Y junctions based on SiON waveguides, 3D movable micromechanical structures, optical couplers and photodetectors for optical read-out. The SiON low loss optical waveguides were fabricated by LPCVD processes, compatible with CMOS technology. The diaphragms, used for pressure sensing, obtained by p+ etch stop techniques, were placed under the sensing arm of the interferometer. The cantilevers, used in micromechanical resonators were manufactured by front side micromachining. The optical waveguides were coupled with different types of photodetectors, for optical read-out. Also experiments for hybrid integration of an emitting device have been performed. We used an AlGaAs emitting diode, with high edge emission, mounted in a silicon groove, on the same wafer with the sensor. The lateral emitted light is coupled in the waveguide. One of the main problems that had to be solved will be the matching of all the involved technologies. The result of our research is the demonstration of the compatibility between the technological process involved and the possibility of integration on the same silicon substrate of different components: waveguides, photodiodes, emitting devices, 3D movable microstructures in order to realize intelligent microsensors.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Dana Cristea, Raluca Muller, and Ioan Pavelescu "Micromachined photonic integrated circuits for sensor applications: experimental results", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341187
PROCEEDINGS
 10 PAGES
DOWNLOAD PDF SAVE TO MY LIBRARY
SHARE
GET CITATION
< Previous Article
|
Next Article >
Advertisement
Advertisement
KEYWORDS
RELATED CONTENT
Chiral spiral waveguides based on MMI crossings theory and...
Proceedings of SPIE (March 14 2016)
Fabrication tolerant flat-top interleavers
Proceedings of SPIE (February 20 2017)
Second order add/drop filter with a single ring resonator
Proceedings of SPIE (February 20 2017)
Silicon/porous silicon composite membrane for high-sensitivity pressure sensor
Proceedings of SPIE (February 12 2007)
Development of an optical waveguide cantilever scanner
Proceedings of SPIE (August 27 2003)
Shadow-masked growth and its applications
Proceedings of SPIE (February 16 1993)
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top