Microstereolithography: a new process to build complex 3D objects

Laurence Beluze; Arnaud Bertsch; Philippe Renaud

doi:10.1117/12.341277

10 March 1999 Microstereolithography: a new process to build complex 3D objects

Laurence Beluze, Arnaud Bertsch, Philippe Renaud

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341277
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

In this paper, a new microstereolithography apparatus is described. It is an integral process in which a complete layer can be made in one exposure only, in contrast to vector-by-vector processes which are based on the vectorial tracing of each layer. As for most microstereolithography processes, complex objects can be realized by superimposing layers, each layer being obtained by a light-induced polymerization of a liquid resin. The vertical and transverse resolution of the process we are developing have been measured. Complex in shape objects have been realized: small 3D polymer components have been built such as turbines, microsprings, or micropipes. They are compared of a large number of layers with a resolution better than 5 micrometers in the 3 directions of space. Some of these objects serve to demonstrate that complex in shape 3D objects can be manufactured with this technology. Sample structures which can be used in microfluidics, microrobotics or in the biomedical field are presented.

Citation Download Citation

Laurence Beluze, Arnaud Bertsch, and Philippe Renaud "Microstereolithography: a new process to build complex 3D objects", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341277

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