Multimode frequency analysis for the dynamic characterization of microstructures

Christian Bergaud; L. Nicu; A. Martinez; P. Gerard; M. Benzohra

doi:10.1117/12.341270

10 March 1999 Multimode frequency analysis for the dynamic characterization of microstructures

Christian Bergaud, L. Nicu, A. Martinez, P. Gerard, M. Benzohra

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341270
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A dynamic characterization of SiO₂-Au composite cantilever beams and Si₃N₄-Au composite microbridges, has been performed to determine the effective residual stress in thin film-based microstructures. For the cantilever beams, the first three resonant frequencies were measured and compared to the theoretical ones obtained with a simple analytical model taking into account the effect of the gold layer on the shift of the resonant frequencies. A very good agreement is obtained between theoretical and experimental values showing the validity of the approach. Concerning the composite microbridges, the Rayleigh-Ritz method has been applied to obtain the relationship between the resonant frequencies and the effective residual stress. Using this method, the effective residual stress within the Si₃N₄-Au composite microbridges has been determined, (sigma) _eff equals 610 +/- 40 MPa.

Citation Download Citation

Christian Bergaud, L. Nicu, A. Martinez, P. Gerard, and M. Benzohra "Multimode frequency analysis for the dynamic characterization of microstructures", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341270

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