10 March 1999 Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341237
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Shape memory alloys are used in the manufacture of microactuators and stents. This paper discusses (1) the nature of the surface oxide layer on NiTi shape memory alloys; (2) its role in protecting the underlying base metal from chemical and electrochemical etchants; (3) how the oxide can be removed and;; (4) the necessity of rapid by- product removal from the metal-etchant interface to achieve even the etching of the underlying alloy.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David M. Allen, Sue A. Impey, Remi Robin, Tom T. Chen, "Nature and influence of surface layers and films on the chemical and electrochemical micromachining of NiTi shape memory alloys", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341237; https://doi.org/10.1117/12.341237
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