Paper
10 March 1999 Optical microsystems with microchip lasers and micro-optics
Laurent R. Fulbert, Engin Molva, Jeannine Marty, Philippe Thony, Marc Rabarot, Bernard Ferrand
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341257
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
The microchip laser is the most compact and the simplest diode pumped solid state laser, with a typical dimension of 0.5 mm3. In spite of the extreme simplicity of this concept which was described in sixties, the first devices have been realized much later in eighties, in different laboratories in the world. The main advantage of the microchip laser is its ability to be fabricated with collective fabrication processes, using techniques such as currently used in microelectronics, allowing a low cost mass production with a good reproducibility and reliability. The microchip lasers are very simple to use without any optical alignment and any maintenance. They foretell a true technical revolution in the domain of solid state lasers which should be opened to high volume and low cost markets. They have many different industrial applications in large markets such as: automotive, laser marking and material processing, environmental and medical applications, public works, telecommunications, etc.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laurent R. Fulbert, Engin Molva, Jeannine Marty, Philippe Thony, Marc Rabarot, and Bernard Ferrand "Optical microsystems with microchip lasers and micro-optics", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341257
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KEYWORDS
Semiconductor lasers

Etching

Microlens

Semiconducting wafers

Fiber lasers

Nd:YAG lasers

Laser applications

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