10 March 1999 Physical modeling and simulation of microdevices and microsystems
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341195
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
In the development of microdevices and microsystems, computer simulations constitute a cost-effective and time- saving alternative to the traditional experimental approach by 'straightforward trial and error'. Application-oriented modeling does not only allow the visualization of fabrication processes and operational principles, but it also assists the designer in making decisions with a view to finding optimized microstructures under technological and economical constraints. The long-term vision is the automated optimization of microsystems according to customer-supplied specifications in a computer-based 'virtual factory' prior to the real fabrication. To this end, strong efforts have to be made towards a predictive 'CAD tool box' for top-down and closed-loop simulation of microsystems. We discuss the most important aspects to be focussed on and practicable methodologies for microdevice and system modeling such as the consistent treatment of coupled fields and coupled domains, physically-based models for full system and mixed-mode simulation, and the reliable validation and calibration of models.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerhard Wachutka, "Physical modeling and simulation of microdevices and microsystems", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341195; https://doi.org/10.1117/12.341195


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