Translator Disclaimer
10 March 1999 Production of movable metallic microstructures by aligned hot embossing and reactive ion etching
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341173
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Hot embossing is an inexpensive method for the reproduction of microstructures. It has matured during the last few years from a pure laboratory method to an industrially applicable process. As an example, the technology for the production of movable metallic microstructures by aligned to embossing and reactive ion etching is presented, which has been developed at the Forschungszentrum Karlsruhe/IMT.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oliver Roetting, Bernd Koehler, Frank-Joachim Reuther, Hartmut Blum, and Walter Bacher "Production of movable metallic microstructures by aligned hot embossing and reactive ion etching", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341173
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top