10 March 1999 Production of novel 3D microstructures using excimer laser mask projection techniques
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341245
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Excimer laser ablation is used in conjunction with mask projection techniques to produce novel and complex microstructures. Special multiple-mask techniques have been developed which, together with synchronized workpiece motion and laser firing, are used for the manufacture of features such as micro-channels, ramps, contoured surfaces with channels etc. These new techniques allow planar microstructures to be combined and superimposed onto curved or multifaceted shapes, thereby enabling hitherto unobtainable structures to be produced. Details are given of the techniques used along with examples of the types of structures which have been produced.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nadeem Hasan Rizvi, Nadeem Hasan Rizvi, } "Production of novel 3D microstructures using excimer laser mask projection techniques", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341245; https://doi.org/10.1117/12.341245
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