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10 March 1999 Prospective MEMS applications at NEC
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999)
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
This paper describes several silicon micromachined devices that have been developed at NEC from the viewpoint of commercial applications. The author learned it was difficult to continually succeed in business, even if the related technology could be established. It is supposed that the market for micromachined devices will soon become saturated, leading to strong cost competition and declining profitability. On the other hand, the potential wide applications for MEMS will allow many companies to develop their own specialties in the future.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenichiro Suzuki "Prospective MEMS applications at NEC", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999);


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