Providing technology infrastructure for MEMS

Renato P. Ribas; D. Veychard; Jean Michel Karam; Bernard Courtois

doi:10.1117/12.341213

10 March 1999 Providing technology infrastructure for MEMS

Renato P. Ribas, D. Veychard, Jean Michel Karam, Bernard Courtois

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341213
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.

Citation Download Citation

Renato P. Ribas, D. Veychard, Jean Michel Karam, and Bernard Courtois "Providing technology infrastructure for MEMS", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341213

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