10 March 1999 Providing technology infrastructure for MEMS
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341213
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
CMP has been providing infrastructures for integrated circuits manufacturing since 1981. These infrastructures have been extended to provide services for MEMS manufacturing. These services are available to Universities and Companies.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Renato P. Ribas, D. Veychard, Jean Michel Karam, Bernard Courtois, "Providing technology infrastructure for MEMS", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341213; https://doi.org/10.1117/12.341213
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