10 March 1999 SUNRED: a new field solving approach
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341211
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
The recently reported 2D successive network reduction (SUNRED) algorithm has been extended to solve thermal or electro-static fields in 3D. The paper presented the models and the solution algorithm of the 3D version and discusses in details the efficiency of the new 3D-field solver. Comparisons with other solvers demonstrate the superior features of SUNRED. The tool extensively supports the compact thermal model generation of the analyzed structure. A novel type of analysis, the time constant analysis is introduced in the paper.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir Szekely, Vladimir Szekely, A. Pahi, A. Pahi, Marta Rencz, Marta Rencz, } "SUNRED: a new field solving approach", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341211; https://doi.org/10.1117/12.341211
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