10 March 1999 Testing philosophy behind the micro analysis system
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Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341224
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Microsystem testing has to cope with many problems, resulting from inaccessibility, different technologies and non-electrical failure modes. Possible test techniques have been investigated to test a new advanced microsystem. The implementation form and application area highly contributes to the choices made.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hans G. Kerkhoff, Hans G. Kerkhoff, "Testing philosophy behind the micro analysis system", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); doi: 10.1117/12.341224; https://doi.org/10.1117/12.341224
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