Radiation-stimulated processes in Si surface layers

Patrick W. M. Jacobs; Arnold E. Kiv; Vladimir N. Soloviev; Tatiana N. Maximova; Valery V. Chislov

doi:10.1117/12.347417

5 May 1999 Radiation-stimulated processes in Si surface layers

Patrick W. M. Jacobs, Arnold E. Kiv, Vladimir N. Soloviev, Tatiana N. Maximova, Valery V. Chislov

Proceedings Volume 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (1999) https://doi.org/10.1117/12.347417
Event: International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, 1998, St. Petersburg, Russian Federation

Abstract

Molecular dynamics computer simulations have been performed to study the character of disordering atom configurations in Si surface layers. The relaxation of free Si surface was investigated. The main structural parameters were calculated, such as a distribution of angles between chemical bonds, the density of dangling bonds, structural peculiarities of Si surface layers and radiation effects. It was concluded that Si surface at real conditions is a disordered phase similar to a- Si.

Citation Download Citation

Patrick W. M. Jacobs, Arnold E. Kiv, Vladimir N. Soloviev, Tatiana N. Maximova, and Valery V. Chislov "Radiation-stimulated processes in Si surface layers", Proc. SPIE 3687, International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 May 1999); https://doi.org/10.1117/12.347417

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available