Cross-beam pulsed laser deposition of ultrathin multilayer metal films

Andre A. Gorbunov; A. Tselev; Wolfgang Pompe

doi:10.1117/12.337535

20 January 1999 Cross-beam pulsed laser deposition of ultrathin multilayer metal films

Andre A. Gorbunov, A. Tselev, Wolfgang Pompe

Proceedings Volume 3688, 6th International Conference on Industrial Lasers and Laser Applications '98; (1999) https://doi.org/10.1117/12.337535
Event: 6th International Conference on Industrial Lasers and Laser Applications '98, 1998, Shatura, Moscow Region, Russian Federation

Abstract

High efficiency of material usage accompanied with reliable droplets filtering is demonstrated in the cross-beam pulsed laser deposition of nm-period metallic multilayers. The mean and maximum kinetic energies of ions in CBLD have proved to be 2-3 times lower as compared to the conventional PLD. Ballistic simulations of the resulting transition layer thickness in nm-period metallic multilayers are presented.

Citation Download Citation

Andre A. Gorbunov, A. Tselev, and Wolfgang Pompe "Cross-beam pulsed laser deposition of ultrathin multilayer metal films", Proc. SPIE 3688, 6th International Conference on Industrial Lasers and Laser Applications '98, (20 January 1999); https://doi.org/10.1117/12.337535

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