Recurrence interferometric data processing for a noncontact surface profile testing system

Igor P. Gurov; Adalet N. Djabiev

doi:10.1117/12.337551

20 January 1999 Recurrence interferometric data processing for a noncontact surface profile testing system

Igor P. Gurov, Adalet N. Djabiev

Proceedings Volume 3688, 6th International Conference on Industrial Lasers and Laser Applications '98; (1999) https://doi.org/10.1117/12.337551
Event: 6th International Conference on Industrial Lasers and Laser Applications '98, 1998, Shatura, Moscow Region, Russian Federation

Abstract

Recurrence method of interferometric data processing was developed and investigated. The method proposed is based on theory of stochastic difference equations. Recurrence filtering of measured surface profile data provides the result definition in a wide range of profile deviation with moderate requirement to a priori estimates of interferometric process parameters. There were found the accuracy estimates of real interference signal parameters in a two-wavelength interferometer with phase recovering in real time scale of data obtaining.

Citation Download Citation

Igor P. Gurov and Adalet N. Djabiev "Recurrence interferometric data processing for a noncontact surface profile testing system", Proc. SPIE 3688, 6th International Conference on Industrial Lasers and Laser Applications '98, (20 January 1999); https://doi.org/10.1117/12.337551

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