512x512-element GeSi/Si heterojunction infrared FPA

Hideo Wada; Mitsuhiro Nagashima; Kenkichi Hayashi; Junji Nakanishi; Masafumi Kimata; Norimasa Kumada; Sho Ito

doi:10.1117/12.354561

26 July 1999 512x512-element GeSi/Si heterojunction infrared FPA

Hideo Wada, Mitsuhiro Nagashima, Kenkichi Hayashi, Junji Nakanishi, Masafumi Kimata, Norimasa Kumada, Sho Ito

Proceedings Volume 3698, Infrared Technology and Applications XXV; (1999) https://doi.org/10.1117/12.354561
Event: AeroSense '99, 1999, Orlando, FL, United States

Abstract

We have developed a monolithic 512 X 512 element GeSi/Si heterojunction IR focal plane array (FPA). The operation mechanism of the GeSi/Si heterojunction detector is the same as that of the PtSi/Si Schottky-barrier detector. We have fabricated the GeSi/Si heterojunction using MBE technology, and have confirmed that ideal strained GeSi films are grown on Si substrate. We have evaluated the dependencies of spectral responsivity on the Ge composition, impurity concentration and GeSi thickness, and have optimized them for 8-12 micrometers IR detection. The 512 X 512 element FPA has a pixel size of 34 X 34 micrometers ² and a fill factor of 59 percent. A low noise equivalent temperature difference of 0.08 K was obtained with a 300 K background with a very small responsivity dispersion of 2.2 percent.

Citation Download Citation

Hideo Wada, Mitsuhiro Nagashima, Kenkichi Hayashi, Junji Nakanishi, Masafumi Kimata, Norimasa Kumada, and Sho Ito "512x512-element GeSi/Si heterojunction infrared FPA", Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); https://doi.org/10.1117/12.354561

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available