26 July 1999 Even more applications of uncooled microbolometer sensors
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Abstract
Lockheed Martin IR Imaging Systems is developing low cost, high performance, uncooled IR imaging products for both military and commercial applications. These products are based on microbolometer technology, a silicon micromachined sensor that combines wafer level silicon processing with a device structure capable of yielding excellent imaging performance. Here, in the third of a series of papers, we report on several applications that are utilizing the Lockheed Martin microbolometer sensor. The performance of our basic uncooled sensor has been measured to determine sensor capabilities for insertion into both military and commercial products. Non-linearity of the sensor over a scene temperature range of 95 degrees C is less than 0.5 percent. Our sensor typically have temporal NETDs of less than 70 mK as well as spatial NETDs of less than 50 mK, with an instantaneous dynamic range of 84 dB, and a total dynamic range of 120 dB. MRTD performance is less than 0.4 degrees C at spatial frequencies more than 20 percent beyond Nyquist. Spatial noise variation over time has been measured and found to meet both commercial and military requirements with excellent spatial noise over wide scene and ambient temperature ranges. Some of the multiple applications in which our uncooled sensor have been used have been described in reports demonstrating the varied and unique uses of this product. Our sensor is now used by dozens of partners and customers for applications ranging from hand-held radiometric camera to driving aids; from long range surveillance cameras to miniature cameras; from rifle sights to helmet mounted camera. These applications will be discussed along with their unique system level performance parameters. Video will be used to demonstrate the various applications discussed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas B. Breen, Thomas B. Breen, Margaret Kohin, Margaret Kohin, Charles A. Marshall, Charles A. Marshall, Robert Murphy, Robert Murphy, Timothy E. White, Timothy E. White, Arthur R. Leary, Arthur R. Leary, Todd W. Parker, Todd W. Parker, } "Even more applications of uncooled microbolometer sensors", Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); doi: 10.1117/12.354533; https://doi.org/10.1117/12.354533
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