26 July 1999 Linear thermopile array for fast searching
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Abstract
A linear thermopile array with characteristics of high responsivity, fast response and low cost has been developed for use in searching for and detecting heat-radiating objects. The thermopile is fabricated by means of a silicon surface micromachining, compatible Si CMOS process and a lift-off technique, which result in a precisely patterned Au black absorption layer. The dynamic signal-to-noise ratio is proposed as a new figure of merit for evaluating thermal IR sensors and is used to design the thermopile configuration so as to obtain optimum responsivity and thermal time constant. The newly fabricated thermopile array is composed of a zigzag arrangement of two rows of seven IR sensing elements and achieves responsivity of 230 V/W and a thermal time constant of 0.5 msec. The array, incorporating an optical system with a 30-mm-diameter of 80 m for a target with a background temperature difference of 25 degrees C.
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Nami Shibata, Masaki Hirota, Fuminori Sato, Hidemi Yasui, Shinichi Morita, "Linear thermopile array for fast searching", Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); doi: 10.1117/12.354556; https://doi.org/10.1117/12.354556
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