26 July 1999 Thermal infrared microscopy (TIM) with sub-10-μm spatial resolution
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Abstract
We present thermal IR microscopy systems suitable for a spatial resolution below 10micrometers . This resolution close to the fundamental limit is achieved using high resolution FPA - IR cameras, a high speed microscopy optic and acquisition of multiple frames which are shuffled by software in real time. Some fundamental consideration to gain insight into the task of thermal microscopy are briefed. The minimum resolvable temperature and the noise equivalent temperature difference both are a function of thermal diffusivity i.e. material properties, integration time and optics. The basic relationships are explained using numerical modeling. Based on our considerations and knowledge we developed different TIM-Systems, each having specific advantages and are therefore more or less suitable for certain applications. A high spatial temperature or thermal resolution is necessary for different materials under investigation. Examples demonstrate the unique capabilities of the innovative systems and give a glance of the various technical applications of TIM systems.
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Thomas Hierl, Thomas Hierl, Oliver Schreer, Oliver Schreer, Juergen Zettner, Juergen Zettner, Werner Gross, Werner Gross, Max J. Schulz, Max J. Schulz, } "Thermal infrared microscopy (TIM) with sub-10-μm spatial resolution", Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); doi: 10.1117/12.354546; https://doi.org/10.1117/12.354546
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