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26 July 1999 Uncooled micromachined thermopile arrays and readout circuits
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Abstract
We have developed linear micromachined thermopile arrays, and integrated circuit read-out chips for them. Each detector in the array combines a suspended micromachined structure, a thin-film RI absorber, and a thin-film thermopile. The IR absorption in the detectors assures sensitivity over a wavelength range from at least 2.5 micrometers through 50 micrometers . Five array types have been produced, which differ from each other in the thermal conductance values of the detectors. All arrays have 128 detectors on 54 micrometers spacings, with (50 micrometers )2 sensitive areas. The CMOS read-out circuit is on a separate chip, and amplifies, digitizes and multiplexes the thermopile signals, yielding a serial digital output on a single line. Measurements of the noise of the read-out chip, with a detector array at its inputs, shows negligible 1/f component to at least as low as 0.1 Hz in frequency. Responsivity, noise D* and time constant have been measured as a function of detector parameters.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David P. Osterman, Roy Patt, Richard Hunt, K. Lane, and Stephen D. Gaalema "Uncooled micromachined thermopile arrays and readout circuits", Proc. SPIE 3698, Infrared Technology and Applications XXV, (26 July 1999); https://doi.org/10.1117/12.354539
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