2 August 1999 Thin film resonators as mass transducers for explosives detection
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Sub-miniature thin film resonators (TFR) operating near 2 GHz are being developed as mass transducers for high- sensitivity vapor detection. The TFR sensor are coated with species selective vapor absorbing polymers to develop pattern response to the target species for detection and identification. Eight member arrays of TFR sensor have been fabricated and tested for the detection of characteristics explosive vapors including trinitrotoluene, dinitrotoluene, and dinitrobenzene. The TFR sensor use aluminum nitride as the active piezoelectric element and have ben fabricated with resonator quality factors greater than 200. Response patterns and sensitivity measurements are being made using pure vapors, water solutions of the target species, and solid contaminated with the target vapor species.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Christopher Linnen, Christopher Linnen, Paul H. Kobrin, Paul H. Kobrin, Charles Seabury, Charles Seabury, Alan B. Harker, Alan B. Harker, Robert Andrew McGill, Robert Andrew McGill, Eric J. Houser, Eric J. Houser, Russell Chung, Russell Chung, R. Weber, R. Weber, Timothy M. Swager, Timothy M. Swager, } "Thin film resonators as mass transducers for explosives detection", Proc. SPIE 3710, Detection and Remediation Technologies for Mines and Minelike Targets IV, (2 August 1999); doi: 10.1117/12.357056; https://doi.org/10.1117/12.357056

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